Diamond Materials Layered substrates
Epitaxial Diamond Layers on SCD
A diamond layer grown to follow the crystal orientation of its single-crystal substrate.

Good to know
- The grown layer and supporting substrate need separate specifications.
- Layer thickness, nitrogen and boron content are important distinctions.
- Surface quality and crystal defects matter when the layer is used to build a device.
Specifications
What we define for epitaxial diamond layers on SCD, with units and how each is typically measured. We confirm values for your application in technical review.
Request the datasheetLook up a term in the glossaryDimensions & tolerances
| Parameter | Unit | Typical test method |
|---|---|---|
| Thickness and tolerance (bulk or layer) | mm | Micrometer or optical gauge |
| Lateral size, outline or diameter, and tolerance | mm | Optical measurement |
| Thickness uniformity (total thickness variation) | µm | Thickness mapping or interferometry |
Crystal & purity
| Parameter | Unit | Typical test method |
|---|---|---|
| Face orientation, edge orientation and miscut | XRD or Laue diffraction | |
| Boron concentration and doping (layer or bulk) | cm⁻³ | SIMS or capacitance–voltage |
| Nitrogen content and detection limit | ppb or ppm | FTIR spectroscopy or SIMS |
| Inclusions, growth sectors and defects | Cross-polarised microscopy or birefringence imaging | |
| Dopant uniformity across the area | % | SIMS or Raman mapping |
| Crystalline quality (rocking-curve width) | arcsec | XRD rocking curve |
| Raman linewidth of the diamond line | cm⁻¹ | Raman spectroscopy |
Surface & finish
| Parameter | Unit | Typical test method |
|---|---|---|
| Surface roughness per side | nm Ra | Profilometry or AFM |
| Surface finish condition (as-grown, lapped or polished) | Visual inspection to drawing |
Integration & packaging
| Parameter | Unit | Typical test method |
|---|---|---|
| Substrate, carrier or diamond form | Per drawing | |
| Certificate of conformance and traceability | Supplier declaration |
Where it is used
Requirement to review
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