Diamond Materials Layered substrates

Epitaxial Diamond Layers on SCD

A diamond layer grown to follow the crystal orientation of its single-crystal substrate.

Epitaxial Diamond Layers on SCD, representative image
Representative image

Good to know

  • The grown layer and supporting substrate need separate specifications.
  • Layer thickness, nitrogen and boron content are important distinctions.
  • Surface quality and crystal defects matter when the layer is used to build a device.

Specifications

What we define for epitaxial diamond layers on SCD, with units and how each is typically measured. We confirm values for your application in technical review.

Request the datasheetLook up a term in the glossary

Dimensions & tolerances

ParameterUnitTypical test method
Thickness and tolerance (bulk or layer)mmMicrometer or optical gauge
Lateral size, outline or diameter, and tolerancemmOptical measurement
Thickness uniformity (total thickness variation)µmThickness mapping or interferometry

Crystal & purity

ParameterUnitTypical test method
Face orientation, edge orientation and miscutXRD or Laue diffraction
Boron concentration and doping (layer or bulk)cm⁻³SIMS or capacitance–voltage
Nitrogen content and detection limitppb or ppmFTIR spectroscopy or SIMS
Inclusions, growth sectors and defectsCross-polarised microscopy or birefringence imaging
Dopant uniformity across the area%SIMS or Raman mapping
Crystalline quality (rocking-curve width)arcsecXRD rocking curve
Raman linewidth of the diamond linecm⁻¹Raman spectroscopy

Surface & finish

ParameterUnitTypical test method
Surface roughness per sidenm RaProfilometry or AFM
Surface finish condition (as-grown, lapped or polished)Visual inspection to drawing

Integration & packaging

ParameterUnitTypical test method
Substrate, carrier or diamond formPer drawing
Certificate of conformance and traceabilitySupplier declaration

Where it is used

Requirement to review

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