Integrated & Bonded Substrates Research integration route

Diamond-on-Oxide / Insulator

Diamond over an insulating oxide for structures that need a distinct support.

Diamond-on-Oxide / Insulator, representative image
Representative image

Good to know

  • The diamond, oxide and underlying carrier form separate layers.
  • Bonding and surface preparation are central to the stack design.
  • Published research demonstrates routes; project feasibility is still stack-specific.

Specifications

What we define for diamond-on-oxide / insulator, with units and how each is typically measured. We confirm values for your application in technical review.

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Dimensions & tolerances

ParameterUnitTypical test method
Lateral size, outline or diameter, and tolerancemmOptical measurement
Thickness and tolerance (bulk or layer)mmMicrometer or optical gauge
Thickness uniformity (total thickness variation)µmThickness mapping or interferometry
Edge condition and chip limitMicroscopy inspection to drawing

Surface & finish

ParameterUnitTypical test method
Surface roughness per sidenm RaProfilometry or AFM
Surface finish condition (as-grown, lapped or polished)Visual inspection to drawing

Material properties

ParameterUnitTypical test method
Residual stressMPaRaman spectroscopy or wafer-curvature method

Metallization & joining

ParameterUnitTypical test method
Layer sequence and thicknesses (including interlayers)µmCross-section microscopy or per drawing
Bond integrity and bonded area%Acoustic microscopy
Process temperature budget and thermal cycling°CThermal-cycle test with post-test inspection

Electrical & electrochemical

ParameterUnitTypical test method
Dielectric constant and loss tangentResonant-cavity measurement

Integration & packaging

ParameterUnitTypical test method
Substrate, carrier or diamond formPer drawing
Wafer bow and warp (including over temperature)µmWafer geometry gauge or profilometry
Thermal boundary resistancem²K/WTime-domain thermoreflectance
Certificate of conformance and traceabilitySupplier declaration

Where it is used

Requirement to review

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