Integrated & Bonded Substrates Semiconductor integration

GaN-on-Diamond

Brings gallium nitride (GaN) close to a diamond layer that conducts heat.

GaN-on-Diamond, representative image
Representative image

Good to know

  • “GaN-on-diamond” describes a stack, not one universal fabrication route.
  • GaN thickness, supporting layers and the interface need independent definition.
  • The material stack alone does not establish finished transistor performance.

Specifications

What we define for GaN-on-diamond, with units and how each is typically measured. We confirm values for your application in technical review.

Request the datasheetLook up a term in the glossary

Dimensions & tolerances

ParameterUnitTypical test method
Lateral size, outline or diameter, and tolerancemmOptical measurement
Thickness and tolerance (bulk or layer)mmMicrometer or optical gauge
Thickness uniformity (total thickness variation)µmThickness mapping or interferometry
Edge condition and chip limitMicroscopy inspection to drawing

Crystal & purity

ParameterUnitTypical test method
Crystalline quality (rocking-curve width)arcsecXRD rocking curve
Dislocation densitycm⁻²X-ray topography or etch-pit counting

Surface & finish

ParameterUnitTypical test method
Surface roughness per sidenm RaProfilometry or AFM

Metallization & joining

ParameterUnitTypical test method
Layer sequence and thicknesses (including interlayers)µmCross-section microscopy or per drawing
Process temperature budget and thermal cycling°CThermal-cycle test with post-test inspection
Bond integrity and bonded area%Acoustic microscopy

Integration & packaging

ParameterUnitTypical test method
Substrate, carrier or diamond formPer drawing
Thermal boundary resistancem²K/WTime-domain thermoreflectance
Wafer bow and warp (including over temperature)µmWafer geometry gauge or profilometry
Inspection plan and documentationPer drawing
Certificate of conformance and traceabilitySupplier declaration

Where it is used

Requirement to review

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