Integrated & Bonded Substrates Supported diamond films

Diamond-on-Silicon

A diamond layer carried on silicon rather than a free-standing diamond part.

Diamond-on-Silicon, representative image
Representative image

Good to know

  • The silicon provides support for the diamond layer.
  • Diamond thickness and surface condition define the working face.
  • Retaining or removing the silicon changes the final component structure.

Specifications

What we define for diamond-on-silicon, with units and how each is typically measured. We confirm values for your application in technical review.

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Dimensions & tolerances

ParameterUnitTypical test method
Thickness and tolerance (bulk or layer)mmMicrometer or optical gauge
Lateral size, outline or diameter, and tolerancemmOptical measurement
Thickness uniformity (total thickness variation)µmThickness mapping or interferometry
Edge condition and chip limitMicroscopy inspection to drawing

Crystal & purity

ParameterUnitTypical test method
Grain size and textureµmEBSD or optical microscopy

Surface & finish

ParameterUnitTypical test method
Surface roughness per sidenm RaProfilometry or AFM
Surface finish condition (as-grown, lapped or polished)Visual inspection to drawing

Material properties

ParameterUnitTypical test method
Residual stressMPaRaman spectroscopy or wafer-curvature method
Thermal conductivity gradeW/m·KLaser flash (ASTM E1461)

Metallization & joining

ParameterUnitTypical test method
Layer sequence and thicknesses (including interlayers)µmCross-section microscopy or per drawing
Bond integrity and bonded area%Acoustic microscopy
Process temperature budget and thermal cycling°CThermal-cycle test with post-test inspection

Integration & packaging

ParameterUnitTypical test method
Substrate, carrier or diamond formPer drawing
Wafer bow and warp (including over temperature)µmWafer geometry gauge or profilometry
Certificate of conformance and traceabilitySupplier declaration

Where it is used

Requirement to review

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