Integrated & Bonded Substrates Expansion-managed stacks

Strain-Balanced Diamond Substrates

Layered substrates arranged to manage deformation caused by thermal expansion.

Strain-Balanced Diamond Substrates, representative image
Representative image

Good to know

  • Layer materials, thicknesses and symmetry influence strain balance.
  • Warpage must be evaluated over the relevant temperature range.
  • A named architecture does not establish suitability for every package.

Specifications

What we define for strain-balanced diamond substrates, with units and how each is typically measured. We confirm values for your application in technical review.

Request the datasheetLook up a term in the glossary

Dimensions & tolerances

ParameterUnitTypical test method
Flatness or surface figure, and bowµm or fringesInterferometry (633 nm) or profilometry
Lateral size, outline or diameter, and tolerancemmOptical measurement
Thickness and tolerance (bulk or layer)mmMicrometer or optical gauge
Thickness uniformity (total thickness variation)µmThickness mapping or interferometry
Edge condition and chip limitMicroscopy inspection to drawing

Surface & finish

ParameterUnitTypical test method
Surface roughness per sidenm RaProfilometry or AFM

Material properties

ParameterUnitTypical test method
Coefficient of thermal expansion (per temperature range)ppm/KThermomechanical analysis (ASTM E831)
Residual stressMPaRaman spectroscopy or wafer-curvature method
Thermal conductivity gradeW/m·KLaser flash (ASTM E1461)

Metallization & joining

ParameterUnitTypical test method
Layer sequence and thicknesses (including interlayers)µmCross-section microscopy or per drawing
Bond integrity and bonded area%Acoustic microscopy
Process temperature budget and thermal cycling°CThermal-cycle test with post-test inspection
Heat-cycle dimensional stabilitycyclesThermal-cycle test with post-test inspection

Integration & packaging

ParameterUnitTypical test method
Wafer bow and warp (including over temperature)µmWafer geometry gauge or profilometry
Certificate of conformance and traceabilitySupplier declaration

Where it is used

Requirement to review

Have a material requirement? Let’s review it.

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