Integrated & Bonded Substrates Vertical interconnects

Through-Diamond Via Substrates

Diamond substrates with through-thickness features for an integrated package.

Through-Diamond Via Substrates, representative image
Representative image

Good to know

  • A drilled opening and a conductive interconnect are different deliverables.
  • Via geometry and metallization define the electrical path.
  • Isolation from neighbouring contacts must be included in the layout.

Specifications

What we define for through-diamond via substrates, with units and how each is typically measured. We confirm values for your application in technical review.

Request the datasheetLook up a term in the glossary

Dimensions & tolerances

ParameterUnitTypical test method
Via diameter and pitchµmOptical microscopy
Thickness and tolerance (bulk or layer)mmMicrometer or optical gauge
Lateral size, outline or diameter, and tolerancemmOptical measurement
Flatness or surface figure, and bowµm or fringesInterferometry (633 nm) or profilometry
Edge condition and chip limitMicroscopy inspection to drawing

Surface & finish

ParameterUnitTypical test method
Surface roughness per sidenm RaProfilometry or AFM

Material properties

ParameterUnitTypical test method
Thermal conductivity gradeW/m·KLaser flash (ASTM E1461)

Metallization & joining

ParameterUnitTypical test method
Metallization or plating stack and thicknessnm per layerXRF or cross-section
Metallization pattern and coverageOptical inspection to drawing
Metal adhesionNPull or scratch test
Heat-cycle dimensional stabilitycyclesThermal-cycle test with post-test inspection

Electrical & electrochemical

ParameterUnitTypical test method
Electrical isolationΩInsulation-resistance test
Via resistancemΩFour-point probe

Integration & packaging

ParameterUnitTypical test method
Seal integrity and chemical compatibilityatm·cc/sHelium leak test
Certificate of conformance and traceabilitySupplier declaration

Where it is used

Requirement to review

Have a material requirement? Let’s review it.

Share your through-diamond via substrates requirement, dimensions and drawing for review.